Inertial nanostep piezoelectric drive: modeling and experiment
Olga M. Gorbenko,
Stanislav Y. Lukashenko,
Stepan V. Pichakhchi,
Ivan D. Sapozhnikov,
Mikhail L. Felshtyn,
Alexander O. Golubok https://doi.org/10.17586/2220-8054-2024-15-5-643-653
Abstract
A vertical inertial nanostep piezoelectric drive is considered. A virtual model was created, and the operating modes of a real drive were studied by numerical experiment. Piezo electromechanical resonance was discovered and a method to eliminate resonant vibrations by increasing electrical losses in the discharge circuit of the piezo actuator capacitance was proposed. A satisfactory agreement between the calculated and experimental data for the drive steps in the nanometer displacement range was obtained.
About the Authors
Olga M. Gorbenko
Institute for Analytical Instrumentation of RAS
Russian Federation
Russian Federation
Olga M. Gorbenko
St. Petersburg
Stanislav Y. Lukashenko
Institute for Analytical Instrumentation of RAS
Russian Federation
Russian Federation
Stanislav Y. Lukashenko
St. Petersburg
Stepan V. Pichakhchi
Institute for Analytical Instrumentation of RAS; St. Petersburg Academic University
Russian Federation
Russian Federation
Stepan V. Pichakhchi
St. Petersburg
Ivan D. Sapozhnikov
Institute for Analytical Instrumentation of RAS
Russian Federation
Russian Federation
Ivan D. Sapozhnikov
St. Petersburg
Mikhail L. Felshtyn
Institute for Analytical Instrumentation of RAS
Russian Federation
Russian Federation
Mikhail L. Felshtyn
St. Petersburg
Alexander O. Golubok
Institute for Analytical Instrumentation of RAS; St. Petersburg Academic University
Russian Federation
Russian Federation
Alexander O. Golubok
St. Petersburg
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Review
For citations:
Gorbenko O.M., Lukashenko S.Y., Pichakhchi S.V., Sapozhnikov I.D., Felshtyn M.L., Golubok A.O. Inertial nanostep piezoelectric drive: modeling and experiment. Nanosystems: Physics, Chemistry, Mathematics. 2024;15(5):643-653. https://doi.org/10.17586/2220-8054-2024-15-5-643-653
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