Synthesis and research of physical and chemical properties of InGaZn2O5 prepared by nitrate-glycolate gel decomposition method
E. S. Anannikov,
T. A. Markin,
I. A. Solizoda,
G. M. Zirnik,
D. A. Uchaev,
A. S. Chernukha,
S. A. Gudkova,
D. A. Vinnik https://doi.org/10.17586/2220-8054-2024-15-6-806-813
Abstract
Indium-gallium-zinc oxide InGaZn2O5 was synthesized by nitrate-glycolate gel decomposition method using ethylene glycol as a complexing and chelating agent. In this work, SEM, EDS and UV-visdiffusion spectra of IGZO were obtained. InGaZn2O5 optical band gap was found using Kubelka–Munk transformation. The morphology of the particles was examined: at low sintering temperatures many micro-meter particles are observed, the sample is heterogeneous in crystalline state. At annealing temperatures above 800˚C a single-phase crystalline structure is observed.
Keywords
indium-gallium-zinc oxide,
IGZO,
InGaZn2O5,
nitrate-glycolate gel,
chelating reagent,
ethylene glycol,
chelate-nitrate method
Supporting agencies: The research is supported by the Ministry of Science and Higher Education of the Russian Federation (state assignment) No. 075-03-2024-117, project number FSMG-2024-0028.
About the Authors
E. S. Anannikov
Moscow Institute of Physics and Technology
Russian Federation
Russian Federation
Egor S. Anannikov
Institutsky lane, 9, Dolgoprudny, 141701
T. A. Markin
Moscow Institute of Physics and Technology
Russian Federation
Russian Federation
Timofey A. Markin
Institutsky lane, 9, Dolgoprudny, 141701
I. A. Solizoda
Moscow Institute of Physics and Technology; St. Petersburg State University; Tajik National University
Tajikistan
Tajikistan
Ibrohimi A. Solizoda
Institutsky lane, 9, Dolgoprudny, 141701
Universitetskaya embankment, 7–9, 199034, St. Petersburg
Rudaki Av., 17, Dushanbe, 734025
G. M. Zirnik
Moscow Institute of Physics and Technology
Russian Federation
Russian Federation
Gleb M. Zirnik
Institutsky lane, 9, Dolgoprudny, 141701
D. A. Uchaev
South Ural State University
Russian Federation
Russian Federation
Daniil A. Uchaev
Lenin Av., 76, Chelyabinsk, 454080
A. S. Chernukha
Moscow Institute of Physics and Technology; St. Petersburg State University; South Ural State University
Russian Federation
Russian Federation
Alexander S. Chernukha
Institutsky lane, 9, Dolgoprudny, 141701
Universitetskaya embankment, 7–9, 199034, St. Petersburg
Lenin Av., 76, Chelyabinsk, 454080
S. A. Gudkova
Moscow Institute of Physics and Technology; St. Petersburg State University
Russian Federation
Russian Federation
Svetlana A. Gudkova
Institutsky lane, 9, Dolgoprudny, 141701
Universitetskaya embankment, 7–9, 199034, St. Petersburg
D. A. Vinnik
Moscow Institute of Physics and Technology; St. Petersburg State University; South Ural State University
Russian Federation
Russian Federation
Denis A. Vinnik
Institutsky lane, 9, Dolgoprudny, 141701
Universitetskaya embankment, 7–9, 199034, St. Petersburg
Lenin Av., 76, Chelyabinsk, 454080
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For citations:
Anannikov E.S., Markin T.A., Solizoda I.A., Zirnik G.M., Uchaev D.A., Chernukha A.S., Gudkova S.A., Vinnik D.A. Synthesis and research of physical and chemical properties of InGaZn2O5 prepared by nitrate-glycolate gel decomposition method. Nanosystems: Physics, Chemistry, Mathematics. 2024;15(6):806-813. https://doi.org/10.17586/2220-8054-2024-15-6-806-813
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